Maskless deposition of gold patterns on silicon

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DOIResolve DOI: http://doi.org/10.1116/1.1321753
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TypeArticle
Journal titleJournal of Vacuum Science & Technology B
Volume18
Issue6
Pages31983201; # of pages: 4
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744224
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Record identifier016716e0-a891-4c6b-843c-c6b6475a266e
Record created2009-10-27
Record modified2016-05-09
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