The use of etching during the precise manufacture of optical multilayer coatings

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TypeArticle
Proceedings titleSVC, Society of Vacuum Coaters : 45th Annual Technical Conference proceedings
Conference45th Annual Technical Conference of the Society of Vacuum Coaters, April 13-18, 2002, Lake Buena Vista, Florida
Pages262265; # of pages: 4
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12346729
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Record identifier04dab4ee-6e2d-4f02-a034-b8173534497c
Record created2009-09-17
Record modified2016-05-09
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