Subwavelength grating Fourier-transform interferometer array in silicon-on-insulator

Download
  1. Get@NRC: Subwavelength grating Fourier-transform interferometer array in silicon-on-insulator (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1002/lpor.201300063
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleLaser and Photonics Reviews
ISSN1863-8880
Volume7
Issue6
PagesL67L70
SubjectCalibration measurements; Fourier transform spectrometers; Free spectral range; Interferometer arrays; Optical path difference; Sub-wave length grating; Sub-wavelength; Subwavelength grating waveguides; Circular waveguides; Diffraction gratings; Errors; Fabrication; Fourier transform infrared spectroscopy; Interferometry; Light extinction; Mach-Zehnder interferometers; Planar waveguides; Silicon on insulator technology; Spectral resolution; Spectrometers; Electric losses
AbstractA planar waveguide Fourier-transform spectrometer with densely arrayed Mach-Zehnder interferometers is demonstrated. Subwavelength gratings are used to produce an optical path difference without waveguide bends. The fabricated device comprises of an array of 32 Mach-Zehnder interferometers, which produce a spatial interferogram without any moving parts, yielding a spectral resolution of 50 pm and a free-spectral range of 0.78 nm. As a result of similar propagation losses in subwavelength grating waveguides and conventional strip waveguides, loss imbalance is minimized and high interferometic extinction ratio of -25 to -30 dB is obtained. Furthermore, phase and amplitude errors arising from normal fabrication variation are compensated by the spectral retrieval process using calibration measurements. A planar waveguide Fourier-transform spectrometer with densely arrayed Mach-Zehnder interferometers is demonstrated. Subwavelength gratings are used to produce an optical path difference without waveguide bends. The fabricated device comprises of an array of 32 Mach-Zehnder interferometers, which produce a spatial interferogram without any moving parts, yielding a spectral resolution of 50 pm and a free-spectral range of 0.78 nm. As a result of similar propagation losses in subwavelength grating waveguides and conventional strip waveguides, loss imbalance is minimized and high interferometic extinction ratio of -25 to -30 dB is obtained. Furthermore, phase and amplitude errors arising from normal fabrication variation are compensated by the spectral retrieval process using calibration measurements. © 2013 by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Publication date
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedYes
NPARC number21270549
Export citationExport as RIS
Report a correctionReport a correction
Record identifier069d7203-a1d6-4c1d-b809-85237371b0d2
Record created2014-02-17
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)