Composition Modulation in High-k Hafnium Silicate Films

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DOIResolve DOI: http://doi.org/10.1017/S1431927610059143
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TypeArticle
Journal titleMicroscopy and Microanalysis
Volume16
IssueSuppl. 2
Pages19041905; # of pages: 2
Publication date
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedYes
NPARC number17161796
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Record identifier07b8207b-8006-49de-aa5b-01a543146155
Record created2011-03-26
Record modified2017-03-23
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