A convenient method for electron tomography sample preparation using a focused ion beam

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DOIResolve DOI: http://doi.org/10.1002/jemt.22044
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TypeArticle
Journal titleMicroscopy Research and Technique
Volume75
Issue9
Pages11651169; # of pages: 5
Subjectelectron tomography; sample preparation; FIB; high tilt range; thin film deposition
AbstractHere we report a new sample preparation method for three-dimensional electron tomography. The method uses the standard film deposition and focused ion beam (FIB) methods to significantly reduce the problems arising from the projected sample thickness at high tilt angles. The method can be used to prepare tomography samples that can be imaged up to a ±75° tilt range which is sufficient for many practical applications. The method can minimize the problem of Ga+ contamination, as compared to the case of FIB preparation of rod-shaped samples, and provides extended thin regions for standard 2D projection analyses.
Publication date
PublisherWiley
LanguageEnglish
AffiliationNational Research Council Canada; Security and Disruptive Technologies
Peer reviewedYes
NPARC number21268162
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Record identifier0a699e58-b9b8-4753-9912-793888be0425
Record created2013-05-14
Record modified2016-05-09
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