Meso-structure study of a porous SiO2 thin film on 001 Si by TEM

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TypeArticle
ConferenceMicroscopy and Microanalysis 2003, Aug 2003, San Antonio, Texas
Pages500
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Steacie Institute for Molecular Sciences
Peer reviewedNo
NPARC number12346735
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Record identifier0be5f205-8381-455d-bdc4-f13680882704
Record created2009-09-17
Record modified2016-05-09
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