Fabrication of nanoelectromechanical resonators using a cryogenic etching technique

Alternative titleJournal of Vacuum Science & Technology B
TypeOther
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedNo
NRC number477
NPARC number8926540
Export citationExport as RIS
Report a correctionReport a correction
Record identifier11fc1ca8-5e03-4e96-8445-c620110ec81b
Record created2009-04-23
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)