A Novel Program-Erasable Capacitor Using High-k AlN Dielectric

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TypeArticle
Conference62nd Device Research Conference DRC, 2004
Volume77
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346369
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Record identifier13ab3e1d-af36-4c29-aa3e-5b95c11e3f75
Record created2009-09-17
Record modified2016-05-09
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