Reactively sputtered silicon-oxynitride films and filters

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Proceedings titleSVC, Society of Vacuum Coaters : 49th annual technical conference proceedings
Conference49th Annual Technical Conference, Society of Vacuum Coaters, 22-27 April 2006, Washington, D.C., USA
Pages725727; # of pages: 3
Publication date
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12346737
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Record identifier142e7306-2231-4593-ad6d-8d7c15b8ab07
Record created2009-09-17
Record modified2016-05-09
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