Nanoscale optomechanical sensors: split-beam photonic crystal nanocavities

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DOIResolve DOI: http://doi.org/10.1109/NUSOD.2013.6633101
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for:
TypeArticle
Proceedings title13th International Conference on Numerical Simulation of Optoelectronic Devices, NUSOD 2013
Series titleProceedings of the ... International Conference on Numerical Simulation of Optoelectronic Devices
Conference13th International Conference on Numerical Simulation of Optoelectronic Devices, NUSOD 2013, August 19-22, 2013, Vancouver, BC, Canada
ISSN2158-3234
ISBN9781467363105
Article number6633101
Pages1516; # of pages: 2
SubjectMechanical displacements; Nanomechanical resonances; Nanoscale cantilevers; Opto-mechanical sensors; Photonic crystal nanocavities; Photonic crystal nanocavity; Resonance frequencies; Silicon cantilever; Computer simulation; Nanocantilevers; Nanotechnology; Numerical models; Optimization; Photonic crystals; Sensors; Optoelectronic devices
AbstractOptomechanical nanocavities allow nanomechanical resonances to be measured optically with high sensitivity. We have created a new type of photonic crystal nanocavity optomechanical sensor optimized for detecting sources of torque and other forces which can deflect nanoscale cantilevers. This nanocavity consists of two precisely engineered photonic Bragg mirrors patterned in silicon cantilevers and separated by a 50-100 nm wide gap. Simulations of the optical and mechanical modes predict that mechanical displacements of the sub-picogram cantilevers will shift the optical nanocavity resonance frequency at a rate exceeding 20 GHz / nm, and that the nanocavity optical mode may have a quality factor Qo > 10⁶in optimized devices.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); Security and Disruptive Technologies
Peer reviewedYes
NPARC number21270972
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Record identifier145c9d76-9c9e-4a53-a6b3-d14251fd539a
Record created2014-02-18
Record modified2016-05-09
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