Absorbance measurement of polymers at EUV wavelength: Correlation between experimental and theoretical calculations

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TypeArticle
Journal titleJournal of Vacuum Science & Technology B
Volume24
Issue4
Pages18226; # of pages: 1817
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number82
NPARC number8926228
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Record identifier1693b44e-3aca-47d5-86c6-922fa7af0874
Record created2009-04-23
Record modified2016-05-09
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