Self-consistent determination of line-width and probe shape using atomic force microscopy

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DOIResolve DOI: http://doi.org/10.1088/0957-0233/24/8/085401
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TypeArticle
Journal titleMeasurement Science and Technology
Volume24
Issue8
Article numberMST/463723/PAP
Pages110; # of pages: 10
Subjectline-width; probe shape; atomic force microscopy; critical dimension
AbstractA self-consistent method for determining line-width and probe shape using an atomic force microscope (AFM) has been developed. Through acquisition of three images in which one tip images the other, and each tip images the sample a least-squares determination of the shapes of both tips, and the parameters that define the line-width standard can be determined. Application of the self-consistent method produces measurements that can be made traceable to the definition of the metre through appropriate calibration of the AFM. A comparison between the line-width determined by the method and a calibrated line-width standard shows good agreement. Sources of uncertainty specific to the self-consistent method are discussed.
Publication date
PublisherIOP Science
LanguageEnglish
AffiliationMeasurement Science and Standards; National Research Council Canada
Peer reviewedYes
NPARC number21268468
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Record identifier17d707e2-386b-4b84-8a4b-1763c01cc5b0
Record created2013-07-25
Record modified2016-05-09
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