Electrical Characterization of metal-oxide-semiconductor capacitors with anodic and plasma-nitrided oxides

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DOIResolve DOI: http://doi.org/10.1116/1.582250
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TypeArticle
Journal titleJournal of Vacuum Science & Technology A
Volume18
Issue2
Pages676680; # of pages: 5
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744027
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Record identifier1a15a485-736b-4e96-84c8-7c8700b7cd1e
Record created2009-10-27
Record modified2016-05-09
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