Composition and strain contrast of Si1-xGex (x = 0.20) and Si1-yCy (y < 0.015) epitaxial strained films on (100) Si in annular dark field images

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DOIResolve DOI: http://doi.org/10.1063/1.3082019
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TypeArticle
Journal titleJournal of Applied Physics
Volume105
Issue4
Pages043517–; # of pages: 1
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12441077
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Record identifier1b306486-5c3e-40af-9449-c2d991dbf05b
Record created2009-09-25
Record modified2016-05-09
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