Fabrication and inspection of micro and nanostructures

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TypeArticle
ConferenceNRC Microscopy Workshop, September 10, 2003, Ottawa
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346519
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Record identifier1e5f48cb-cf21-49b3-ae65-8bbb11fa0efa
Record created2009-09-17
Record modified2016-05-09
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