Rapid fabrication of tooling for microfluidic devices via laser micromachining and hot embossing

Download
  1. (PDF, 953 KB)
  2. Get@NRC: Rapid fabrication of tooling for microfluidic devices via laser micromachining and hot embossing (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1088/0960-1317/18/2/025012
AuthorSearch for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleJournal of Micromechanics and Microengineering
ISSN1361-6439
Volume18
Subjectmicrofluidics; micromold fabrication; laser micro machining; hot embossing
AbstractThis paper presents a new method for rapid fabrication of polymeric micromold masters for the manufacture of polymer microfluidic devices. The manufacturing method involves laser micromachining of the desired structure of microfluidic channels in a thin metallic sheet and then hot embossing the channel structure onto poly(methyl methacrylate) PMMA substrate to form the mold master. The channeled layer of the microfluidic device is then produced by pouring the polydimethylsiloxane (PDMS) elastomer over the mold and curing it. The method is referred to as LHEM (laser micromachining, hot embossing and molding). Polymers like PDMS are preferred over silicon as the material for building microfluidic devices because of their biocompatibility properties as well as because of their lower cost. The proposed manufacturing method involves fewer processing steps than the conventional soft lithography process and enables manufacture of non-rectangular channels in microfluidic devices. To test the method, a mold for a micro capillary electrophoresis microfluidic chip was fabricated. The experimental results confirmed that high quality (Ra 10 to 100 nm) molds can be fabricated quickly and inexpensively. Advantages and limitations of the proposed method are discussed in the concluding section of the paper.
Publication date
LanguageEnglish
AffiliationNRC Industrial Materials Institute; National Research Council Canada
Peer reviewedYes
NPARC number21274343
Export citationExport as RIS
Report a correctionReport a correction
Record identifier2192bced-2b20-4655-bcd0-9d3cd5841682
Record created2015-03-10
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)