Local thickness measurement through scattering contrast and electron energy-loss spectroscopy

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DOIResolve DOI: http://doi.org/10.1016/j.micron.2011.07.003
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Proceedings titleMicron
ConferenceApplications of EELS in Materials and Physics Research, 20–24 September 2011, Brazil
Pages815; # of pages: 8
Subjectmass-thickness contrast; electron energy-loss spectroscopy (EELS); inelastic mean free path (IMFP); scattering cross section; thickness measurement in TEM
AbstractScattering contrast measurements were performed on thin films of amorphous carbon and polycrystalline Au, as well as single-crystal MgO nanocubes. Based on the exponential absorption law, mass-thickness can be obtained within 10% accuracy by measuring the incident and transmitted intensities in the same image. For mass-thickness measurement of a thin amorphous specimen, a small collection semiangle improves the measurement sensitivity, whereas for the measurement of polycrystalline or single-crystal specimens, a large collection semiangle should be used to reduce diffraction-contrast effects. EELS thickness measurements on MgO nanocubes suggest that the Kramers–Kronig sum-rule method (with correction for plural and surface scattering) gives 10% accuracy at medium collection semiangles but overestimates the thickness at small collection semiangles, due to underestimation of the surface-mode scattering. The log-ratio method, with a formula for inelastic mean free path proposed by Malis et al. (1988), provides 10% accuracy at small collection semiangle, while that proposed by Iakoubovskii et al. (2008a) is preferable for medium and large collection semiangles. As a result of this work, we provide recommendations of preferred methods and conditions for local-thickness measurement in the TEM.
Publication date
AffiliationNational Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NPARC number19734704
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Record identifier22a98d41-cc76-4b9e-a9c7-a5cf4539520e
Record created2012-04-02
Record modified2016-05-09
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