Suspended SOI waveguide with sub-wavelength grating cladding for mid-infrared

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DOIResolve DOI: http://doi.org/10.1364/OL.39.005661
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TypeArticle
Journal titleOptics Letters
ISSN0146-9592
Volume39
Issue19
Pages56615664; # of pages: 4
SubjectMidinfrared; SOI waveguides; Sub-wave length grating
AbstractWe present a new type of mid-infrared silicon-on-insulator (SOI) waveguide. The waveguide comprises a subwavelength lattice of holes acting as lateral cladding while at the same time allowing for the bottom oxide (BOX) removal by etching. The waveguide loss is determined at the wavelength of 3.8 μm for structures before and after being underetched using both vapor phase and liquid hydrofluoric acid (HF). A propagation loss of 3.4 dB/cm was measured for a design with a 300 nm grating period and 150 nm holes after partial removal (560 nm) of BOX by vapor phase HF etching. We also demonstrate an alternative design with 550 nm period and 450 nm holes, which allows a faster and complete removal of the BOX by liquid phase HF etching, yielding the waveguide propagation loss of 3.6 dB/cm.
Publication date
PublisherThe Optical Society
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedYes
NPARC number21272690
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Record identifier251328b4-88cd-478b-b5e5-f5db48c857d0
Record created2014-12-03
Record modified2016-05-09
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