Black layer coatings for the photolithographic manufacture of diffraction gratings

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DOIResolve DOI: http://doi.org/10.1364/AO.41.003306
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TypeArticle
Journal titleApplied Optics
Volume41
Issue16
Pages33063311; # of pages: 6
Publication date
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744661
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Record identifier26421a1a-5e8a-4b48-845a-ae21cebc41ba
Record created2009-10-27
Record modified2016-05-09
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