Proceedings of the 12th Canadian semiconductor technology conference

Alternative titlePapers from the 12th Canadian semiconductor technology conference
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EditorSearch for: Py, Christophe; Search for: Bardwell, Jennifer
TypeArticle
Journal titleJournal of Vacuum Science and Technology A
Volume24
Issue3
Pages587891; # of pages: 305
Publication date
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346358
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Record identifier27eadd23-eaa9-4d03-b96e-eddb28a96cbe
Record created2009-09-17
Record modified2016-05-09
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