Post-processing of Commercial CMOS Chips for the Fabrication of DNA BioFET Sensor Arrays

Alternative titleMater Res Soc Sym
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TypeArticle
Volume951
PagesE0509
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Steacie Institute for Molecular Sciences
Peer reviewedNo
NPARC number12346216
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Record identifier2aec63f5-0091-4809-9a48-1c7289dc64b1
Record created2009-09-17
Record modified2016-05-09
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