Athermal silicon waveguides with bridged subwavelength gratings for TE and TM polarizations

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DOIResolve DOI: http://doi.org/10.1364/OE.20.018356
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TypeArticle
Journal titleOptics Express
ISSN1094-4087
Volume20
Issue16
Pages1835618361; # of pages: 6
SubjectCladding material; Duty cycles; Grating pitch; Silicon waveguide; SU-8 polymer; Sub-wave length grating; Thermooptic coefficients; TM polarization; Cladding (coating); Polarization; Waveguides
AbstractIn this paper, athermal silicon waveguides using bridged subwavelength grating (BSWG) structures are proposed and investigated. The realization of temperature-independent BSWG waveguides for both polarizations is demonstrated numerically and experimentally. SU-8 polymer is used as the cladding material to compensate for the positive thermo-optic (TO) coefficient (dn/dT) of silicon. We investigate the dependence of the effective TO coefficient of BSWG waveguides on both the bridge width and grating duty cycle. The BSWG waveguides have a width of 490 nm, a height of 260 nm, and a grating pitch of 250 nm. Athermal behavior is achieved for both the transverse-magnetic (TM) and the transverse-electric (TE) polarized light for a variety of bridge width and duty cycle combinations. Furthermore, the BSWGs can be designed to be athermal for both TE and TM polarization simultaneously. © 2012 Optical Society of America.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Institute for Microstructural Sciences
Peer reviewedYes
NPARC number21269413
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Record identifier2bae0364-f8fe-4199-8766-0842e0c27a30
Record created2013-12-12
Record modified2016-05-09
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