The effect of microstructure on the interrelationship of electrical, optical and opto-electronic properties in amorphous SixHy alloy films prepared by planar R.F. Magnetron Sputtering

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DOIResolve DOI: http://doi.org/10.1016/0022-3093(85)90787-2
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TypeArticle
Journal titleJournal of non-crystalline solids
ISSN0022-3093
Volume77/78
IssueDecember 2,
Pages825828; # of pages: 4
Publication date
LanguageEnglish
AffiliationNRC Institute for National Measurement Standards; National Research Council Canada
Peer reviewedNo
Identifier10013374
NRC number24702
3496
NPARC number8897489
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Record identifier2cb74e31-9a36-48e5-832a-eacbc4dd6479
Record created2009-04-22
Record modified2016-05-09
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