Glancing angle deposition on a roll: towards high-throughput nanostructured thin films

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DOIResolve DOI: http://doi.org/10.1116/1.4798947
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TypeArticle
Journal titleJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
ISSN0734-2101
Volume31
Issue3
Article number31507
SubjectGeometrical considerations; Glancing angle deposition methods; Nanostructured thin film; Prototype system; Roll to roll manufacturing; Roll-to-roll system (R2R); Nanostructures; Deposition
AbstractIncreasing the throughput of the powerful single-step glancing angle deposition (GLAD) method using a prototype simplified roll-to-roll (R2R) system has been explored. While the conventional GLAD technique is popular for fabricating nanostructured devices in a single deposition step, it is not a high-output process. To evaluate the feasibility of large area GLAD deposition, the authors examined the geometrical considerations required to eventually achieve GLAD in a roll-to-roll manufacturing system. Nominal deposition and rotation angles were mathematically translated to their effective R2R counterparts, allowing for deposition recipes of the archetype GLAD nanostructures (slanted posts, vertical posts, and square spirals) and the mechanics of the phi-sweep technique to be converted to this space. Representative structures were then deposited, and the phi-sweep technique successfully applied, in a prototype single barrel roller R2R experimental system. This prototype system provides a foundation for moving GLAD from the laboratory to mass production. © 2013 American Vacuum Society.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); Security and Disruptive Technologies
Peer reviewedYes
NPARC number21271819
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Record identifier2e3b65b6-8940-42db-bc96-5e74a3cfe6d4
Record created2014-04-22
Record modified2016-05-09
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