Magnetron sputter epitaxy of Gallium Nitride on (0001)sapphire

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DOIResolve DOI: http://doi.org/10.4028/www.scientific.net/MSF.264-268.1229
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TypeArticle
Journal titleMaterials Science Forum
Volume264-268
Pages12291234; # of pages: 1
Subjectepitaxy; magnetron; sputter-epitaxy; GaN; photoluminescence; X-ray; Raman; TEM
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12337926
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Record identifier304dd6b5-0695-4265-8fb7-c78901487ca4
Record created2009-09-10
Record modified2016-05-09
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