Nanoscale resist morphologies of dense gratings using electron-beam lithography

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TypeArticle
Journal titleJ Vac Sci Technol B
Volume25
Issue3
Pages74553; # of pages: 693
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number301
NPARC number8926129
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Record identifier3076ff26-b020-454c-bc58-f6807e3233a1
Record created2009-04-23
Record modified2016-05-09
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