Physics and Technology of High-k Gate Dielectrics III

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TypeBook Chapter
Book titleECStransactions
Volume1
Issue5
PublisherThe Electrochemical Society
PlacePennington, NJ
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346255
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Record identifier309a00d1-265f-4fbd-906a-39a7a819a22d
Record created2009-09-17
Record modified2016-05-09
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