Chemical force microscopy for hot-embossing lithography release layer characterization

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DOIResolve DOI: http://doi.org/10.1039/b600936k
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TypeArticle
Journal titleSoft Matter
Volume2
Issue7
Pages553557; # of pages: 5
AbstractWe employed variable temperature chemical force microscopy (VT-CFM) using tips silanized with four different hydro- and hydrofluoroalkyl self-assembling monolayers (SAMs) interacting with a thin-film of poly(cyclic olefin), (PCO) to model the hot-embossing stamp-polymer interaction over a temperature range spanning the glass transition of the PCO.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Industrial Materials Institute
Peer reviewedYes
NRC number48855
NPARC number15878012
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Record identifier311c6fc2-9859-4cab-b0ba-e6368e69a27a
Record created2010-07-30
Record modified2016-05-09
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