Nanophotonic detection of side-coupled nanomechanical cantilevers

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DOIResolve DOI: http://doi.org/10.1063/1.4731210
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TypeArticle
Journal titleApplied Physics Letters
ISSN0003-6951
Volume100
Issue261102
AbstractA silicon nanophotonic Mach-Zehnder interferometer (MZI) is used to detect the mechanical resonance of a cantilever external to a nanophotonicwaveguide. Small cantilever devices, below the cut-off for waveguide supported modes, are fabricated ∼140 nm away from one MZI arm. Cantilever resonant frequencies up to 60 MHz are measured with mechanical quality factors around 20 000 and signal to noise ratios up to 1000. Phase-locked loop frequency stability measurements indicate a mass sensitivity of 2 zg in an example cantilever of 0.5 pg mass. An interferometric transduction mechanism is confirmed, and the system is shown to work effectively in all-optical operation.
Publication date
LanguageEnglish
AffiliationSecurity and Disruptive Technologies; National Research Council Canada
Peer reviewedYes
NPARC number21269053
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Record identifier322969ea-9698-40ad-b74b-a8f619fc26a0
Record created2013-12-03
Record modified2016-05-09
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