Influence of laser parameters and material properties on micro drilling with femtosecond laser pulses

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DOIResolve DOI: http://doi.org/10.1007/s003390051418
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TypeArticle
Journal titleApplied Physics A: Materials Science and Processing
ISSN0947-8396
Volume69
Issue7
PagesS367S371
AbstractWe report experimental results of drilling micro holes in Al, Mo, Ti, Cu, Ag, Au, and brass thin metal foils in air using 60-femtosecond Ti:sapphire laser pulses. The influence of laser parameters and material properties on drilling processes at the sub-10-micron scale has been examined. Comparison of hole drilling using 60-fs pulses with that using 50-ps and 10-ns pulses at an energy fluence of ∼ 15 J/cm2 indicates that a significant amount of melting is present in both ps and ns regimes, whereas with fs pulses, fewer and much smaller droplets from the molten phase are observed.
Publication date
PublisherSpringer International Publishing
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for National Measurement Standards; Security and Disruptive Technologies
Peer reviewedYes
NPARC number21276235
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Record identifier32501c02-ff0c-41c9-b72d-759167126991
Record created2015-09-28
Record modified2016-05-09
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