Fabrication and performance of a photonic-microfluidic integrated device

Download
  1. (PDF, 660 KB)
  2. Get@NRC: Fabrication and performance of a photonic-microfluidic integrated device (Opens in a new window)
DOIResolve DOI: http://doi.org/10.3390/mi3010062
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleMicromachines
Volume3
Issue1
Pages6277; # of pages: 16
SubjectSU-8; PDMS; microfludics; optical waveguide; integration; devices
AbstractFabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics through integration of microlenses onto the chip to mimic conventional cytometry excitation. Devices with beam waists of 6 μm and 12 μm in fluorescent detection and counting tests using 2.5 and 6 μm beads-show CVs of 9%–13% and 23% for the two devices, respectively. These results are within the expectations for a conventional cytometer (5%–15%) and demonstrate the ability to integrate the photonic components for excitation onto the chip and the ability to maintain the level of reliable detection.
Publication date
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedYes
NPARC number19542538
Export citationExport as RIS
Report a correctionReport a correction
Record identifier32a693ad-5082-4b37-a68b-06dc4d535456
Record created2012-02-29
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)