Transition of MEMS Technology to Nanofabrication

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DOIResolve DOI: http://doi.org/10.1166/jnn.2005.129
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TypeArticle
Journal titleJournal of Nanoscience & Nanotechnology
Volume10
Pages15; # of pages: 5
AbstractThe transition of MEMS technology to nano fabrication is a solution to the growing demand for smaller and highdensity feature sizes in the nanometer scale. Techniques for fabricating μm-, and nm-features will be discussed, and results achieved with nanoimprinting technologies will be presented.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Industrial Materials Institute
Peer reviewedYes
NRC number47610
NPARC number15959398
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Record identifier32bf373e-a00d-48a7-893e-0e2c18968ca7
Record created2010-11-02
Record modified2016-05-09
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