Polyimide nanostructures fabricated by nanoimprint lithography and its application as flexible imprint mould

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TypeArticle
Proceedings titleProceedings of the International Conference on Micro- and Nano- Engineering 2005
ConferenceThe 31th International Conference on Micro- and Nano-Engineering (MNE2005), Vienna, Austria, September 19-22, 2005
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Industrial Materials Institute
Peer reviewedNo
NRC number48969
NPARC number15966891
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Record identifier337b2333-9311-439c-88e6-54da3c8e2664
Record created2010-11-02
Record modified2016-05-09
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