Fabrication of kinoform structures by electron beam lithography using resist contrast curve polynomial fitting

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TypeArticle
Conference11th Canadian Semiconductor Technology Conference, 2003, Ottawa
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346636
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Record identifier365d6ec1-f6e7-4899-b22e-a0a497d42569
Record created2009-09-17
Record modified2016-05-09
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