Design and fabrication of a planar PDMS transmission grating microspectrometer

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Journal titleOptics Express
Pages1188911900; # of pages: 12
SubjectAnalytical predictions; Dispersive behaviors; Fluidic components; High refractive index; Microfluidic channel; Monolithic integration; Transmission gratings; Visible-wavelength range; Monolithic integrated circuits; Refractive index; Microchannels; baysilon; dimeticone; article; chemistry; electronics; equipment; equipment design; equipment failure; microfluidic analysis; optical instrumentation; refractometry; spectroscopy; Dimethylpolysiloxanes; Equipment Design; Equipment Failure Analysis; Lenses; Microfluidic Analytical Techniques; Miniaturization; Refractometry; Spectrum Analysis
AbstractWe describe the monolithic integration of microfluidic channels, optical waveguides, a collimating lens and a curved focusing transmission grating in a single PDMS-based microsystem. All optical and fluidic components of the device were simultaneously formed in a single layer of high refractive index (n∼1.43) PDMS by soft lithography. Outer layers of lower-index (n∼1.41) PDMS were subsequently added to provide optical and fluidic confinement. Here, we focus on the design and characterization of the microspectrometer part, which employs a novel self-focusing strategy based on cylindrical facets, and exhibits resolution <10 nm in the visible wavelength range. The dispersive behavior of the grating was analyzed both experimentally and using numerical simulations, and the results are in good agreement with simplified analytical predictions. © 2013 Optical Society of America.
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AffiliationNational Research Council Canada (NRC-CNRC); Industry Partnership Facility
Peer reviewedYes
NPARC number21271846
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Record identifier3908e4e8-45c9-413f-99f8-40e1ae958838
Record created2014-04-23
Record modified2016-05-09
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