The reoxidation of oxynitride films on silicon at 1050°C

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TypeArticle
Journal titleProc. 13th Int'l. Corrosion Congress
Publication date
AffiliationNational Research Council Canada; NRC Plant Biotechnology Institute; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12327245
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Record identifier39d1bc09-24cd-47de-982a-4f421de8c3aa
Record created2009-09-10
Record modified2016-05-09
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