Modeling of Large Area Hot Embossing

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TypeArticle
Proceedings titleProceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 2007
ConferenceSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Stresa, Italy, April 25-27, 2007
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Industrial Materials Institute
Peer reviewedYes
NRC number53651
NPARC number15820156
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Record identifier3ade097f-12b0-452d-b202-a4aaf2abb18a
Record created2010-07-19
Record modified2016-05-09
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