Microstructural Analysis of Ti/Al/Ti/Au Ohmic Contacts to n-AlGaN/GaN

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DOIResolve DOI: http://doi.org/10.1116/1.1472428
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TypeArticle
Journal titleJournal of Vacuum Science & Technology A
Volume20
Issue3
Pages10041010; # of pages: 7
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Steacie Institute for Molecular Sciences
Peer reviewedNo
NPARC number12328229
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Record identifier3b297202-28c1-42c3-a09b-9b053a0d3adb
Record created2009-09-10
Record modified2016-05-09
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