Valence state map of iron oxide thin film obtained from electron spectroscopy imaging series

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DOIResolve DOI: http://doi.org/10.1016/j.micron.2006.06.004
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TypeArticle
Journal titleMicron
Volume38
Issue4
Pages354361; # of pages: 8
SubjectElectron energy-loss spectroscopy(EELS); Electron spectroscopic imaging(ESI); Iron oxide system; Valence state map
AbstractThis paper demonstrates the applicability of electron-spectroscopic imaging (ESI) for valence-state mapping of the iron oxide system. We have previously developed a set of signal-processing methods for an ESI series, to allow mapping of sp2/sp3 ratio, dielectric function and energy bandgap. In this study, these methods are applied to generate a valence-state map of an iron oxide thin film (Fe/[alpha]-Fe2O3). Two problems, data undersampling and a convolution effect associated with extraction of the image-spectrum from the core loss image series, were overcome by using cubic-polynomial interpolation and maximum-entropy deconvolution. As a result, the reconstructed image-spectrum obtained from the ESI series images has a quality as good as that of conventional electron energy-loss spectra. The L3/L2 ratio of the reconstructed ESI spectrum is determined to be 3.30???0.30 and 5.0???0.30 for Fe and [alpha]-Fe2O3, respectively. Our L3/L2 ratio mapping shows an accurate correspondence across the Cu/Fe/[alpha]-Fe2O3 region. The effect of delocalization and chromatic aberration on the ESI resolution is discussed and estimated to be about 2?nm for the case of L3/L2 ratio mapping.
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LanguageEnglish
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NPARC number12327521
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Record identifier3e400363-187b-46a0-b51c-96e16d88498c
Record created2009-09-10
Record modified2016-05-09
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