Indium tin oxide nanowhisker morphology control by vapour-liquid-solid glancing angle deposition

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DOIResolve DOI: http://doi.org/10.1088/0957-4484/23/10/105608
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TypeArticle
Journal titleNanotechnology
ISSN0957-4484
Volume23
Issue10
Article number105608
SubjectDeposition angle; Feature sizes; Flux rates; Glancing angle deposition; Growth conditions; Growth flux; Growth techniques; High surface area; Indium tin oxide; Morphology control; Nanostructured Films; Spatial modulations; Substrate temperature; Transparent conductive; Transparent conductive oxides; VLS growth; Crystal whiskers; Indium compounds; Liquids; Morphology; Nanowhiskers; Tin; Tin oxides; Conductive films
AbstractA new growth technique for indium tin oxide nanowhiskers with increased control over feature size and spacing is reported. The technique is based on a unique combination of self-catalysed vapour-liquid-solid (VLS) growth and glancing angle deposition (GLAD). This VLSGLAD technique provides enhanced control over nanowhisker morphology as the effect of typical VLS growth parameters (e.g.flux rate, temperature) is amplified at large deposition angles characteristic of GLAD. Spatial modulation of the collimated growth flux controls trunk width, number and orientation of branches, and overall nanowhisker density. Here we report the influence of growth conditions (including deposition angle, flux rate, nominal pitch and substrate temperature) on nanowhisker morphology, with specific focus on the effect of large deposition angles. Sheet resistance and transmission of the films were measured to characterize their performance as transparent conductive oxides. Hybrid nanostructured films grown in this study include high surface area nanowhiskers protruding from a conductive film, ideal for transparent conductive electrode applications.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); National Institute for Nanotechnology
Peer reviewedYes
NPARC number21270272
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Record identifier3f43b6ab-5ae0-4b8f-9adb-11b5d4916550
Record created2014-01-20
Record modified2016-05-09
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