Using a TiO 2/ZnO double-layer film for improving the sensing performance of ZnO based NO gas sensor

Download
  1. Get@NRC: Using a TiO 2/ZnO double-layer film for improving the sensing performance of ZnO based NO gas sensor (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1016/j.snb.2011.04.056
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleSensors and Actuators, B: Chemical
ISSN0925-4005
Volume157
Issue2
Pages361367; # of pages: 7
SubjectAnnealing time; Double layers; Double-layer films; Glass substrates; Limit of detection; Nano particulates; Sensing characteristics; Sensing performance; Sensing response; Sensor response; Single layer films; TiO; Transition zones; ZnO; ZnO films; ZnO thin film; Annealing; Chemical sensors; Gas detectors; Gases; Nitric oxide; Substrates; Titanium; Titanium dioxide; Zinc oxide; Film preparation
AbstractNO gas sensors, based on ZnO thin film (ZnO film), TiO 2 nanoparticulate film (TiO 2NP), and TiO 2NP/ZnO film double-layer film, were fabricated, and their sensing characteristics towards NO gas were investigated in this study. The maximal response of a ZnO film deposited onto a rougher Al 2O 3 substrate, towards NO gas, was higher than that of a ZnO film deposited on a smoother glass substrate. Although the sensing response of the TiO 2NPs itself towards NO gas was minute, the TiO 2NP/ZnO film double-layer film showed enhanced response as compared with TiO 2NP or ZnO film single-layer film. In addition, the sensor response of the TiO 2NP/ZnO film double-layer film was strongly influenced by the annealing time for the film preparation; the maximum response to NO was enhanced about 6.2 times as the annealing time was increased from 30 min to 2 h. Based on the XPS results, the increase in the transition zone between TiO 2NP and ZnO film along with the appearance of Ti 3+ state was noticed when the annealing time was increased. With the high sensitive TiO 2NP/ZnO film/Al 2O 3 electrode, the limit of detection (S/N = 3) can be achieved at 8.8 ppb. The double-layer TiO 2NP/ ZnO film also showed improved selectivities with respect to NO 2 and CO. © 2011 Elsevier B.V.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Institute for Chemical Process and Environmental Technology (ICPET-ITPCE)
Peer reviewedYes
NPARC number21271104
Export citationExport as RIS
Report a correctionReport a correction
Record identifier4022e7de-4737-44a6-bb30-b1fdc046c56d
Record created2014-03-24
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)