Fast three-dimensional nanostructure fabrication by laser-assisted nanotransfer printing

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DOIResolve DOI: http://doi.org/10.1063/1.2347693
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TypeArticle
Journal titleApplied Physics Letters
Volume89
Issue11
Pages113103-1113103-3; # of pages: 3
AbstractThe authors present a laser-assisted nanotransfer printing technique for transferring metal nanopatterns onto prepatterned substrates. A fused quartz mold covered with an array of chromium nanodots is pressed against the surface of a photolithographically patterned substrate, while a single laser pulse from a quadrupled-frequency solid state Nd:YAG laser is used to melt the thin metal structures. By controlling the laser fluence, selective metal pattern transfer can be realized only on the protruded area of the substrate upon separation of the quartz support. The transferred chromium nanodots are then used as an etch mask to pattern three-dimensional structures.
Publication date
LanguageEnglish
AffiliationNRC Industrial Materials Institute; National Research Council Canada
Peer reviewedYes
NRC number48873
NPARC number12744379
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Record identifier4188600e-2166-4248-825c-bc993f3f0e92
Record created2009-10-27
Record modified2016-05-09
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