Formation of thin semiconducting films by magnetron sputtering

DOIResolve DOI: http://doi.org/10.1016/B978-0-12-410755-7.50012-9
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TypeBook Chapter
Book titleThin Films from Free Atoms and Particles
ISBN978-0-12-410755-7
Pages257300; # of pages: 44
Publication date
LanguageEnglish
AffiliationNational Research Council Canada
Peer reviewedNo
NPARC number12338220
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Record identifier425fac17-45be-4ec2-bcc6-4d9d12055467
Record created2009-09-10
Record modified2016-05-09
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