Influence of Hydrogen on the Solid Phase Epitaxial Regrowth of Strained Layer Silicon Germanium Alloys

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TypeArticle
Proceedings titleStrained layer epitaxy : materials processing and device applications : symposium held April 17-19, 1995, San Francisco, California, U.S.A.
Series titleMaterials Research Society symposia proceedings; Volume 379
ConferenceStrained layer epitaxy : materials processing and device applications, San Francisco, California, USA, April 17-19, 1995
ISBN1558992820
Pages461466; # of pages: 6
Publication date
PublisherMaterials Research Society
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12339336
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Record identifier46b20147-c9e8-40c3-a1de-6fa8cdb86d61
Record created2009-09-11
Record modified2016-05-09
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