Group IV mid-infrared photonics

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DOIResolve DOI: http://doi.org/10.1117/12.2176219
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TypeArticle
Proceedings titleProceedings of SPIE - The International Society for Optical Engineering
ConferenceSilicon Photonics X, 9 February 2015 through 12 February 2015
ISSN0277-786X
ISBN9781628414578
Volume9367
Article number93670Q
SubjectGermanium; Infrared devices; Mach-Zehnder interferometers; Photonic devices; Photonics; Resonators; Silicon on insulator technology; Waveguides; Mid-infrared detection; Midinfrared; Multi-mode interference; Passive devices; Racetrack resonators; Ring resonator; Silicon waveguide; Sub-wavelength structures; Silicon
AbstractIn this paper we present SOI, suspended Si, and Ge-on-Si photonic platforms and devices for the mid-infrared. We demonstrate low loss strip and slot waveguides in SOI and show efficient strip-slot couplers. A Vernier configuration based on racetrack resonators in SOI has been also investigated. Mid-infrared detection using defect engineered silicon waveguides is reported at the wavelength of 2-2.5 μm. In order to extend transparency of Si waveguides, the bottom oxide cladding needs to be removed. We report a novel suspended Si design based on subwavelength structures that is more robust than previously reported suspended designs. We have fabricated record low loss Ge-on-Si waveguides, as well as several other passive devices in this platform. All optical modulation in Ge is also analyzed.
Publication date
PublisherSPIE
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedYes
NPARC number21275663
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Record identifier4965d81b-007e-4bea-a3be-0dd6f0084065
Record created2015-07-14
Record modified2016-05-09
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