Fabrication of Lithographically-defined Optical Coupling Facets for SOI Waveguides by ICP Etching

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DOIResolve DOI: http://doi.org/10.1116/1.2186657
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TypeArticle
Journal titleJournal of Vacuum Science & Technology A
Volume24
Issue3
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Institute for Information Technology
Peer reviewedNo
NPARC number12744384
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Record identifier4980ac5f-1212-416c-bf01-b2425458ec48
Record created2009-10-27
Record modified2016-05-09
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