Selected porosification of n-InP(100) after focused ion beam implantation of Si

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DOIResolve DOI: http://doi.org/10.1002/pssa.200306496
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TypeArticle
Journal titlephysica status solidi (a)
Volume197
Issue1
Pages180185; # of pages: 6
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744689
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Record identifier49b91a83-04a9-49ed-b278-b524f16c9cd9
Record created2009-10-27
Record modified2016-05-09
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