Materials for future lithography

TypeArticle
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number84
NPARC number8926606
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Record identifier4afc2b8d-f66e-416b-a591-19aee36a5604
Record created2009-04-23
Record modified2016-05-09
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