Defect profiling in multilayered systems using mean depth scaling

Download
  1. Get@NRC: Defect profiling in multilayered systems using mean depth scaling (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1016/0169-4332(94)00332-7
AuthorSearch for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleApplied Surface Science
Volume85
Pages196209; # of pages: 14
AbstractGhosh et al. recently proposed that positron stopping profiles in elements and elemental multilayers, calculated by Monte Carlo for incident positron energies in the range 1-10 keV, may be scaled onto energy independent curves using the mean implantation depth. It is shown here that Monte Carlo stopping profiles in elemental multilayer systems can be reproduced accurately in the incident energy range 1-25 keV using a modification of this scaling model that takes into account the backscattering effects of interfaces. The mean depth scaling approach represents a saving of several orders of magnitude in the computation time for multilayer stopping profiles and has been incorporated into a new defect profiling program POSTRAP6.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12338551
Export citationExport as RIS
Report a correctionReport a correction
Record identifier4b640b8b-5cc9-47d0-8596-057f41ab7ed7
Record created2009-09-10
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)