Fabrication of submicrometer regular arrays of pillars and helices

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DOIResolve DOI: http://doi.org/10.1116/1.591046
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TypeArticle
Journal titleJournal of Vacuum Science & Technology B
Volume17
Issue6
Pages26712674; # of pages: 4
Subjectbismuth; copper; periodic structures; photonic band gap; scanning electron microscopy; titanium; vacuum deposition
AbstractWe use a glancing-angle deposition technique to produce regular lattices of submicrometer pillars and helices with a two-dimensional lattice constant below 1 �m and structure heights of 0.5�10 �m. Possible applications of such structures include photonic crystals and magnetic-storage media.
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LanguageEnglish
Peer reviewedNo
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This is a non-NRC publication

"Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC.

NPARC number12339118
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Record identifier4b7cc940-d12f-4a57-a990-7348ee09990a
Record created2009-09-11
Record modified2016-05-09
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